General Vibration Criteria
> Technique > General Vibration Criteria| Facility Equipment or Use | Vibration Criteria | ||
| 4~8 [Hz] RMS Acceleration |
8~80[Hz] RMS Velocity |
||
| General Vibration Environment | General business establishment | 4gal (displacement 16μm) |
800μm/s |
| Office | 2gal (displacement 8μm) |
400μm/s | |
| Residence &computer system | 1gal (displacement 4μm) |
200μm/s | |
| 100xmicroscope, robotic surgery room operation room, general research lab, &others | 0.5gal
(displacement 2μm) |
100μm/s | |
| Precision Vibration Class : A |
400x microscope, optical or other balance optical comparators in measuring room, electronic equipment, production facilities, etc. ※ Test, probe test, production support facilities &devices |
0.25gal (displacement 1μm) |
50μm/s |
| Precision Vibration Class : B |
400x and higher microscope, precision ophthalmic clinic, neurological surgery room, vibration-proof optical equipment, semiconductor production facilities, etc. ※ Exposure device with 3μm or higher width, such as aligner and stepper |
0.13gal (displacement 0.5μm) |
25μm/s |
| Precision Vibration Class : C |
30,000x microscope, magnetic resonance imager & semiconductor production facilities ※ Exposure device with 1μm or higher width, such as aligner and stepper about 1M DRAM |
0.06gal (displacement 0.25μm) |
12μm/s |
| Precision Vibration Class : D |
30,000x or higher electron microscope, mass spectrometer, cell transplant unit, & semiconductor production facilities ※ Exposure device with 0.5μm or higher width, such as aligner and stepper about 4M DRAM |
0.03gal (displacement 0.12μm) |
6μm/s |
Precision |
Unisolated laser, optical research system, & semiconductor production facilities ※ Exposure device with 0.25μm or higher width, such as aligner and stepper about 64M DRAM |
0.015gal (displacement 0.06μm) |
3μm/s |
※ Based on the permissible vibration level of the floor in accordance with the general degree of precision and resolution of precision equipment
Unit Conversion Chart
| Type | SI Unit | Traditional Unit | Conversion |
| Power | N | kgf | 1kgf=9.8N |
| Spring constant | N/mm | kgf/mm | 1kgf/mm=9.8N/mm |
| Solidity, stress, pressure |
MPa （or /mm²） | kgf/cm² kgf/mm² |
1kgf/cm²=0.098MPa(N/mm²) 1kgf/mm²=9.8MPa(N/mm²) |
| Moment, torque | N·m | kgf·cm | 1kgf·cm=0.098N·m |
| Acceleration | m/sec² cm/sec² |
G Gal |
1G=9.8m/sec² 1gal=1cm/sec² |
※ 1kgf = 9.80665N,but it was written as 9.8for simplification
