Isolator series

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•‌ Diverse product group
‌ ‌ ‌ ‌ isolator series is a pneumatic spring type vibration isolation system which has excellent vibration
‌ ‌ ‌ ‌ isolation performance in diverse application areas from optical microscope and laser application to
‌ ‌ ‌ ‌ the semiconductor, LCD manufacture/investigation and small/Medium/Large stage.

•‌ General-purpose Air Mount Vibration Control System
‌ ‌ ‌ ‌ GPM, GPMK, GDSK Series and oil damper can be optimally installed under various
‌ ‌ ‌ ‌ load conditions and provide excellent performance.

•‌ Applicable to various range of live load
‌ ‌ ‌ ‌ As load conditions vary according to the type and use of precision instruments/installations
‌ ‌ ‌ ‌ requiring vibration control, we satisfy clients' demands by spreading the weight of
‌ ‌ ‌ ‌ an isolator's counter load.

•‌ High performance under the moving load
‌ ‌ ‌ ‌ The product is designed to maintain the vibration isolation performance and high repeated precision under the moving load on
‌ ‌ ‌ ‌ the top part of the medium and large precision stage, and guarantees the high productivity of the medium and large precision
‌ ‌ ‌ ‌ equipment.


Application and usage

•‌ Semiconductor manufacture and inspection
•‌ LCD manufacture and inspection
•‌ Illuminometer, durometer and roundness meter
•‌ Electron microscope
•‌ Atomic force microscope
•‌ Laser processing equipmen
•‌ Coordinate measuring machine
•‌ Precision stage equipment
•‌ Other vibration isolation-required equipment


Lower stage isolator installation example




Vibration transmissibility graph