항 목 | GPM-100 | GPM-200 | GPM-300 | GPM-500 | GPM-1000 | GPM-1500 | GPM-2000 | GPM-2500 | GPM-3000 |
Natural Frequency | 2.0 ~ 3.0 Hz | ||||||||
Isolation Method | Air Spring | ||||||||
Leveling Method | Auto Leveling Device | ||||||||
Leveling repeatability | ± 0.2 mm | ||||||||
Settling Time | 2 ~ 3 sec | ||||||||
SIZE [W x D x H mm] |
140x140x170 | 160x160x170 | 200x200x170 | 240x240x190 | 310x310x190 | 320x320x190 | 360x360x190 | 400x400x190 | 450x450x190 |
Pay Load [kg/ea] |
100 | 200 | 300 | 500 | 1000 | 1500 | 2000 | 2500 | 3000 |
Hole Position [AxB mm] |
120x120 | 140x140 | 180x180 | 210x210 | 280x280 | 280x280 | 320x320 | 360x360 | 410x410 |
Hole SIZE [C mm] |
Φ10 | Φ10 | Φ12 | Φ14 | Φ14 | Φ14 | Φ14 | Φ14 | Φ14 |
Air Pressure | 0.3 ~ 0.6 MPa |