항 목 | GPMK-500 + Oil Damper |
GPMK-1000 + Oil Damper |
GPMK-1500 + Oil Damper |
GPMK-2000 + Oil Damper |
GPMK-2500 + Oil Damper |
GPMK-3000 + Oil Damper |
Natural Frequency | 3.0 ~ 4.0 Hz | |||||
Isolation Method | Air Spring+Oil Damper | |||||
Leveling Method | Auto Leveling Device | |||||
Leveling repeatability | ± 0.2 mm | |||||
Settling Time | 2 ~ 3 sec | |||||
SIZE [W x D x H mm] |
240x240x190 | 310x310x190 | 320x320x190 | 360x360x190 | 400x400x190 | 450x450x190 |
Pay Load [kg/ea] |
500 | 1000 | 1500 | 2000 | 2500 | 3000 |
Hole Position [AxB mm] |
210 x 210 | 280 x 280 | 280 x 280 | 320 x 320 | 360 x 360 | 410 x 410 |
Hole SIZE [C mm] |
Φ14 | Φ14 | Φ14 | Φ14 | Φ14 | Φ14 |
Air Pressure | 0.3 ~ 0.6 MPa |